Yaskawa New Clean Robot Aid Semiconductor Manufacturing Line

Yaskawa Electric Corporation introduced ‘SEMISTAR-GEKKO MD124D’, a new clean robot for semiconductor wafer transfer. The new robot is outfitted with the direct drive motor (DD motor) of the company's AC servo motor 'Σ-7 series'. The robot empowers wafer transfer with higher precision with positioning accuracy twice as high and the hand vibration during transfer is also reduced to 1/6th, in comparison to that of the standard model. Collectively developed ‘SR200’ a standard controller for clean robots, additionally prepares the machine controller (MP), and while its volume and mass are 42% & 35% lower than those of conventional models, it has adaptability to comply with major standards such as SEMI. It is applied to all the clean robots to maximize their performance.

In addition to improving the product specifications, the company additionally offer better quality after-sales services. Such as adoption of battery-less design from the robot and diminishing the task of battery replacement. Also, making it easier for customers to acquire necessary information, which can lead to process analysis and improved productivity. It also reviews the parts procured for both the robot and the controller, empowering the products to be made with sustainability in mind, such as continuing production.

For more information: www.yaskawa-global.com