Sweden-based supplier of industrial productivity solutions, Atlas Copco Group has acquired iTrap®. An ion trap mass spectrometer developed by ZEISS for highly sensitive, real-time gas analysis. It can analyse and control significant chemical processes in vacuum chambers of semiconductor manufacturing equipment and other applications. The technology is used for process analytics and advanced process control in the semiconductor market.  

This is the first external sale of a ZEISS venture. The innovation is slated to benefit from better market synergies that are available outside of ZEISS. The asset deal comprises intellectual properties and the transfer of key employees.

The technology is to be integrated with the Edwards business and will become part of the Semiconductor Chamber Solutions Division in Atlas Copco’s Business Area Vacuum Technique. The technology will benefit from a worldwide sales and service network as well as from innovation and application centres close to all relevant major customer sites globally.

For more information: www.zeiss.com